2018-02-18 - Vivek Bakshi

Challenges and Milestones in EUV

EUV lithography faces short-term gains and long-term challenges in resist, actinic inspection, mask and mask pellicles and light sources.

2018-01-19 - Nitin Dahad, EE Times

EUV Backlog Grows as ASML Sets Sales Record

CEO says preparation to insert next-generation EUV lithography into volume manufacturing "shifted into a higher gear" last year.