ST Establishes “Lab-in-Fab” to Adoption of Piezoelectric MEMS in Singapore

Article By : STMicroelectronics

STMicroelectronics establishes first “Lab-in-Fab” to advance adoption of piezoelectric MEMS in Singapore in partnership with A*STAR and ULVAC...

STMicroelectronics announces a collaboration with A*STAR’s IME, a research institute in Singapore, and ULVAC, a leading Japanese manufacturing-tool vendor, to jointly setup and operate an 8-inch (200mm) R&D line focused on Piezo MEMS technology within ST’s existing manufacturing facility in Singapore.

The first of its kind in the world, this “Lab-in-Fab” R&D line brings together three partners with leading-edge and complementary competencies in Piezo materials, Piezo MEMS technologies, and wafer-fab tools to boost innovation and accelerate development of new materials, process technologies, and ultimately, products for industry customers.

The Lab-in-Fab consists of a new cleanroom area within ST’s Ang Mo Kio campus and will host tools and dedicated resources from the three parties, which include MEMS R&D and process scientists and engineers. IME’s knowledge base and industrial drive in piezo-MEMS device design, process integration, and system integration will add value to the development of the line. IME will also contribute state-of-the-art tools to help ensure a smooth product flow through to production, all within the same location. The new R&D line will also leverage existing ST resources, benefiting from the economies of scale of ST’s wafer fabs on the same campus. The “Lab-in-Fab” facility is forecast to be ready and operational with first wafers in Q2 2021 and volume production at the end of 2022.

This collaboration enhances the existing manufacturing-process portfolio of ST Singapore and will accelerate the adoption of Piezo MEMS actuators in promising new fields of application, including MEMS Mirrors for Smart Glasses, AR Headsets and LIDAR systems, Piezoelectric Micromachined Ultrasonic Transducers (PMUT) for emerging medical applications, and Piezo Heads for Commercial and industrial 3-D Printing.

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