TSMC roadmap reveals 7 and 5nm with EUV, projecting 12 million wafers produced in 2018
The law of diminishing returns may prove anything smaller than 5nm difficult
Differing forecasts on 5nm EUV manufacturing process as Imec researchers uncover random defects
CEO says preparation to insert next-generation EUV lithography into volume manufacturing "shifted into a higher gear" last year.
Confirms it expects to use next-generation lithography technology with 7nm process next year; adds 11nm low power plus process to foundry offerings.
Most chips execs believe EUV lithography will be used in volume production before 2021 but mask costs continue to rise, two surveys said.