TSMC's boast that it is the first to commercialize EUV lithography is probably justified, according to analysts.
Extreme ultraviolet lithography still faces reliability issues, but it's ready for volume use, Intel's EUV chief said
Edge placement error has emerged as a new challenge to good semiconductor yields, says an expert from Applied Materials who gives guidance for dealing...
The semiconductor roadmap could extend a decade to a 1-nm node or it could falter before the 3-nm node for lack of new resist chemistries
List of EUV related concerns shrinking rapidly as industry collectively pushes onward
Outlines future roadmap, starting with 7nm EUV during second half of 2017
TSMC roadmap reveals 7 and 5nm with EUV, projecting 12 million wafers produced in 2018
Several years of incremental growth erupted into a 13 percent leap in 2017
The law of diminishing returns may prove anything smaller than 5nm difficult
Cadence and Imec making strides, projecting tapeout of 64-bit CPU as early as late 2018