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Deposition, etch equipment revs up 3D NAND ramp-up

Posted: 08 Jul 2014     Print Version  Bookmark and Share

Keywords:3D NAND  etch  deposition  Lam Research 

[Summary of tips] Greater process control is needed to reduce cost as memory makers ramp up chip production. Stepping up to the task, Lam Research Corp. unveiled its latest thin film deposition and plasma etch products addressing the need for three of the most critical steps in forming 3D NAND memory cells: stack deposition, vertical channel etc......
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