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Gigaphoton unveils world's first helium-free purge process

Posted: 02 Jul 2014     Print Version  Bookmark and Share

Keywords:Gigaphoton  purge process  helium  nitrogen  ArF immersion laser 

[Summary of tips] Gigaphoton Inc., a maker of lithography light source, has revealed that it has developed an innovative purge process, one that does not use the rare gas helium, for its flagship GT series of ArF immersion lasers. As a move toward advancing its "Green Innovations" environmental technologies where it intends to reduce the consump......
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