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Sonoscan unveils MEMS wafer inspection system

Posted: 27 Jun 2014  Print Version  Bookmark and Share

Keywords:Sonoscan  MEMS wafer  inspection system  transducer 

[Summary of tips] Sonoscan has introduced its AW322 200 fully automated system for ultrasonic inspection of MEMS wafers. The system, based on the company's C-SAM technology, images and identifies internal gap-type defects down to 5um. It is intended for finding non-bonds, voids and other defects in the seals surrounding the MEMS wafer cavities.T......
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