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A primer on BAW gyroscopes for inertial sensing

Posted: 29 May 2014  Print Version  Bookmark and Share

Keywords:MEMS  gyroscopes  bulk acoustic wave  BAW  HARPSS 

[Summary of tips] Systems and products these days incorporate MEMS sensors, particularly MEMS gyroscopes, as essential components. These applications range from portable and wearable devices to industrial robots and critical automotive safety systems. Their requirements for lower power, smaller form-factor, environmental tolerance and lower cost......
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