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Quantum photolithography writes 1nm lines at industry speed

Posted: 17 Feb 2014     Print Version  Bookmark and Share

Keywords:quantum optical lithography  Storex  photoresist 

[Summary of tips] A team of researchers reveals that quantum optical lithography at a resolution down to 1nm half-pitch on a proprietary photoresist enables pattern transfer onto a silicon wafer. The research was led by Storex Technologies CEO Dr. Eugen Pavel, and published in Optics & Laser Technology.Delivering a performance several times bett......
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