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EVG outs high-volume-mfg photoresist processing system

Posted: 13 Feb 2014  Print Version  Bookmark and Share

Keywords:EVG  photoresist  TSV  3D IC  interposer manufacturing 

[Summary of tips] EV Group (EVG) has rolled out what it describes as its most advanced 300mm photoresist processing system for logic and memory high-volume manufacturing (HVM). The EVG150XT resist coating and developing system boasts its XT Frame platform used across its spectrum of industry-leading systems, and is optimized for ultra-high throu......
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