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Double-layer capping improves packaging for MEMS devices

Posted: 20 Jan 2014  Print Version  Bookmark and Share Subscribe 

Keywords:A*STAR Institute of Microelectronics  MEMS  sensor  switch  radio filter 

[Summary of tips] A team of researchers at A*STAR Institute of Microelectronics, Singapore has created an innovative technology that promises safe and functional encasements for microelectromechanical systems (MEMS) such as sensors, switches or radio filters."MEMS devices need certain ambient conditions to operate properly and have fragile hangi......
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