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EVG unveils full-field UV nanoimprint lithography system

Posted: 05 Dec 2013  Print Version  Bookmark and Share Subscribe 

Keywords:EV Group  nanoimprint lithography  UV  UV-NIL 

[Summary of tips] EV Group (EVG) has announced the EVG 720 automated UV nanoimprint lithography (UV-NIL) system. According to the firm, the system offers full-field imprint lithography with an integrated soft stamp/template fabrication capability, and enables throughputs of more than 60 wafers per hour with the lowest cost of ownership (CoO).Cap......
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