Murata Electronics considers RF for MEMS

What is a sensor?
A device that receives and responds to a stimulus or signal. Sensors measure real-world conditions, such as heat or light, and then converts this condition into analog or digital representation.

What does MEMS stand for?
MEMS stands for microelectromechanical systems. They are tiny mechanical devices that are built onto semiconductor chips and are measured in micrometers. They are used to make pressure, temperature, chemical and vibration sensors, light reflectors and switches as well as accelerometers for airbags, vehicle control, pacemakers and games.