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A*STAR: Aluminium–germanium sealant toughens MEMS

Posted: 01 Mar 2013  Print Version  Bookmark and Share Subscribe 

Keywords:MEMS sensor  aluminium-germanium  metal alloys 

[Summary of tips] A team of researchers at A*STAR Institute of Microelectronics has investigated a couple of metal alloys that could give micro-electromechanical system (MEMS) sensors better protection in the toughest environments. They wanted to find cheaper, more durable alternatives to the metal solders, such as gold-tin or copper-tin, which ......
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