Manufacturing/Packaging 
Nano-positioning system uses magnetic levitation
Keywords:nano-positioning system 6D sensor capacitive sensors digital motion controller
[Summary of tips] Physik Instrumente (PI) has recently developed a novel nano-positioning system based on magnetic levitation. PI developed the system with the aid of the IMMS (Institut für Mikroelektronik- und Mechatronik-Systeme) and the Department of Mechatronics of Ilmenau University of Technology. The platform levitates on a magnetic f......Please login or register with us to view this article>>
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