Sensors/MEMS 
A*STAR develops robust MEMS pressure sensor
Keywords:miniaturized pressure sensor MEMS piezoresitor silicon nanowires
[Summary of tips] A research team from the A*STAR Institute of Microelectronics in Singapore has produced a miniaturized sensor that couples a stable diaphragm with sensitive silicon nanowires paving way for MEMS pressure sensors that are operationally robust.In principle, the design of a miniaturized pressure sensor is straightforward: create a......Please login or register with us to view this article>>
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