Global Sources
EE Times-Asia
Stay in touch with EE Times Asia
 
EE Times-Asia > Sensors/MEMS
 
 
Sensors/MEMS  

A*STAR develops robust MEMS pressure sensor

Posted: 07 Jan 2013     Print Version  Bookmark and Share

Keywords:miniaturized pressure sensor  MEMS  piezoresitor  silicon nanowires 

[Summary of tips] A research team from the A*STAR Institute of Microelectronics in Singapore has produced a miniaturized sensor that couples a stable diaphragm with sensitive silicon nanowires paving way for MEMS pressure sensors that are operationally robust.In principle, the design of a miniaturized pressure sensor is straightforward: create a......
Please login or register with us to view this article>>
 


Article Comments - A*STAR develops robust MEMS pressure...
Comments:  
*  You can enter [0] more charecters.
*Verify code:
 
 
Webinars

Seminars

Visit Asia Webinars to learn about the latest in technology and get practical design tips.

 
 
Back to Top