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A*STAR develops robust MEMS pressure sensor

Posted: 07 Jan 2013  Print Version  Bookmark and Share Subscribe 

Keywords:miniaturized pressure sensor  MEMS  piezoresitor  silicon nanowires 

[Summary of tips] A research team from the A*STAR Institute of Microelectronics in Singapore has produced a miniaturized sensor that couples a stable diaphragm with sensitive silicon nanowires paving way for MEMS pressure sensors that are operationally robust.In principle, the design of a miniaturized pressure sensor is straightforward: create a......
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