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Issues of EUV lithography

Posted: 22 Nov 2011     Print Version  Bookmark and Share

Keywords:EUV lithography  manufacturing technology  IC manufacturing 

[Summary of tips] Extreme-violet (EUV) lithography, the next big step in chip manufacturing, is still not ready for prime time. This would mean that global chip makers who plan to use EUV manufacturing technology may have to leverage more complicated, as well as expensive, strategies to extend the current lithography tools they are using, such a......
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