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Inspection tool monitors edge profiles

Posted: 06 Sep 2010  Print Version  Bookmark and Share Subscribe

Keywords: edge  metrology  inspection tool  wafer inspection 

[Summary of tips] KLA-Tencor Corp. unveils the VisEdge CV300R-EP edge metrology and inspection tool. The tools offers two edge-metrology capabilities designed to help fabs identify potentially yield-impacting irregularities in the shape of the wafer edge profile or in the edges of films deposited on the wafer.To maximize the number of devices pe......
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