CMOS oscillators operate up to 133MHz

What is CMOS?
Complementary Metal Oxide Semiconductor, or commonly referred to as CMOS, is a type of IC which includes microprocessor, microcontroller, static RAM and other digital logic circuits.

What is an oscillator?
An electronic circuit used to generate high-frequency pulses.

What does MEMS stand for?
MEMS stands for microelectromechanical systems. They are tiny mechanical devices that are built onto semiconductor chips and are measured in micrometers. They are used to make pressure, temperature, chemical and vibration sensors, light reflectors and switches as well as accelerometers for airbags, vehicle control, pacemakers and games.