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Execs weigh in on right path for litho

Posted: 24 Mar 2010  Print Version  Bookmark and Share Subscribe 

Keywords:lithography  extreme ultraviolet  EUV  e-beam 

[Summary of tips] Intel Corp. led the formation of EUV LLC consortium in 1997, which planned to commercialize extreme ultraviolet lithography (EUV) by 2005. Advanced Micro Devices, IBM, Infineon and Micron were among the companies that signed on to the effort.EUV was supposed to have replaced conventional optical lithography by now. But optical ......
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