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Manufacturing/Packaging  

Long road still to e-beam direct-write litho

Posted: 11 Mar 2010  Print Version  Bookmark and Share Subscribe

Keywords: e-beam  direct-write lithography  nanoelectronics  EUV 

[Summary of tips] While multiple development efforts focused on e-beam direct-write lithography have reported progress, a one prominent lithography researcher claims production tools are still a minimum of five years away.Based on the length of time it has historically taken for each new lithography technology to move from proof-of-concept to pr......
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