Manufacturing/Packaging 
TSMC denies taking on Nikon scanner
Keywords: Taiwan Nikon deal lithography 195nm scanner
[Summary of tips] Foundry giant Taiwan Semiconductor Manufacturing Co. Ltd denies buying a new 193nm immersion lithography scanner from Nikon Corp.—for now. For years, TSMC has primarily used only one lithography vendor: ASML Holding NV. But TSMC reportedly bought a new 193nm immersion lithography scanner from rival Nikon of Japan, accordi......Please login or register with us to view this article>>
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