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TSMC, CEA-Leti team on maskless litho

Posted: 08 Jul 2009  Print Version  Bookmark and Share Subscribe

Keywords: maskless lithography  manufacturing 

[Summary of tips] CEA-Leti signed an agreement with Taiwan Semiconductor Manufacturing Co. Ltd for the latter to join CEA-Leti's IMAGINE industrial program on maskless lithography for IC manufacturing. The program allows companies to assess a maskless lithography infrastructure for IC manufacturing and use MAPPER Technology as a solution towards......
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