Manufacturing/Packaging 
ASML reveals 22nm litho road map
Keywords: immersion lithography EUV 22nm
[Summary of tips] In the midst of a shaky economic climate, ASML Holding NV laid out its road map for lithography systems needed to drive semiconductors down to 22nm and beyond. ASML is prepared to ship its next-generation immersion lithography system next year and its extreme UV (EUV) system in 2010, said company executives.The company's curren......Please login or register with us to view this article>>
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