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Applied takes on KLA-Tencor in mask inspection market

Posted: 17 Apr 2008  Print Version  Bookmark and Share Subscribe

Keywords: photomask inspection  cleaning equipment  wafer fab 

[Summary of tips] Applied Materials Inc. has made its entry into the photomask inspection business, by rolling out a new tool based on a breakthrough aerial imaging technology. Meanwhile, rival KLA-Tencor Corp. has rolled out a technology said to accomplish the same fete: It shows the defects on the wafer within its mask inspection system.The ch......
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