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Manufacturing/Packaging  

Sematech launches nanoimprint litho program

Posted: 29 Feb 2008  Print Version  Bookmark and Share Subscribe

Keywords: nanoimprint lithography  optical lithography  32nm node 

[Summary of tips] Sematech has started a development program in nanoimprint lithography, a move that's expected to be a major boost in this arena.As part of the plan, the consortium has purchased new tool technology from Molecular Imprints Inc (MII). The latter's new Imprio 300 line of nanoimprint lithography systems will be delivered to Sematec......
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