Manufacturing/Packaging 
MEMS measurement tech could increase wafer yields
Keywords: MEMS wafer measurement technique
[Summary of tips] Most instruments used to measure properties in MEMS are far too big to determine standard physical properties such as stiffness.To remedy this, the U.S. National Institute of Standards and Technology (NIST) has developed a set of testing procedures for MEMS-sized structures using optical non-contact instrumentation. Besides MEM......Please login or register with us to view this article>>
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