Manufacturing/Packaging 
MEMS pioneer draws up technology's course
Keywords: MEMS technology SiTime sensors silicon resonators micromachining
[Summary of tips] Petersen: By 2010, the MEMS resonator and timing-chip markets will total over $7.5 billion—that's enough for us.Kurt Petersen has been called a "founding father of MEMS" because of his pioneering research work on MEMS at IBM Corp. in the 1970s. He has co-founded four MEMS startups, the most successful of which, NovaSensor......Please login or register with us to view this article>>
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