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Litho woes weigh down semicon industry

Posted: 16 Apr 2007  Print Version  Bookmark and Share Subscribe

Keywords: EUV lithography for IC production  lithography friendly designs  extreme-ultraviolet lithography 

[Summary of tips] The lithography world has suddenly turned upside-down as the industry gets socked by a double whammy: The window of opportunity is slowly closing on extreme-ultraviolet (EUV) lithography for IC production, but the most likely alternative—a version of 193nm immersion—is proving expensive. The added costs could have s......
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