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Sematech to advance planar solution devt for 22nm
Keywords: Sematech CMOS CMOS planar scaling FinFET SiGe
[Summary of tips] Pushing forward with the planar transistor scaling strategy under its CMOS Extension Program, Sematech front-end engineers will combine planar CMOS approaches with new channel materials to develop transistors for the 22nm half-pitch technology generation. Sematech will also continue to investigate FinFET devices as an alternati......Please login or register with us to view this article>>
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