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New microscope enables atomic-scale wafer analysis
Keywords: FEI transmission electron microscope Helios NanoLab TEM wafer analysis
[Summary of tips] FEI Co. will unveil a family of transmission electron microscopes (TEM) that it says will enable atomic-scale imaging and analysis of semiconductor wafers.FEI's Helios NanoLab 400S will be showcased at Semicon Japan this week (Dec. 6-8). The Helios NanoLab is a family of dual-beam TEMs.A focused ion beam on the NanoLab can cut ......Please login or register with us to view this article>>
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