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EUV making slow progress, reports Intel

Posted: 20 Nov 2006  Print Version  Bookmark and Share Subscribe

Keywords: Intel  EUV  extreme ultraviolet  lithography  Mark LaPedus 

[Summary of tips] An Intel Corp. technologist disclosed that extreme ultraviolet (EUV) lithography is making little progress, prompting the firm to look at the deployment of immersion technology at its 32nm node.''There's not a whole lot of different with [EUV technology] from a year ago,'' said Mike Mayberry, director of components research and......
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