Manufacturing/Packaging 
RTP system eases shift to single-wafer processing
Keywords: Mattson Atmos rapid thermal processing rapid thermal oxidation RTP
[Summary of tips] Mattson Technology Inc. is extending its rapid thermal processing (RTP) technology into the growing rapid thermal oxidation (RTO) market with the latest addition to its family of advanced RTP solutions.Built upon the Helios platform, Atmos is a dual-chamber, single-wafer 300mm RTP system for high-volume chip manufacturing throu......Please login or register with us to view this article>>
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