Manufacturing/Packaging 
Tool limits need for immersion lithography at 45nm
Keywords: Invarium Dimension45/32 DimensionPPC patterning-synthesis software immersion lithography
[Summary of tips] Faced with few other viable choices, many leading-edge chipmakers are reluctantly migrating to immersion lithography for the 45nm node. While immersion will enable them to print the new feature sizes, it is not without its drawbacks, starting with the price tag: An immersion lithography tool is said to cost as much as $40 milli......Please login or register with us to view this article>>
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