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OPC tool has mask 3-D imaging effects
Keywords: Brion Tachyon M3D optical proximity correction OPC Dylan McGrath
[Summary of tips] DFM lithography simulation vendor Brion Technologies Inc. this week introduced Tachyon M3D, promising more accurate optical proximity correction (OPC) implementation and verification by incorporating mask three-dimensional imaging effects.According to Brion, Tachyon M3D constructs image-based photomask imaging models through el......Please login or register with us to view this article>>
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