Manufacturing/Packaging 
Lithography efforts trailing 32nm target
Keywords: David Lammers lithography 32nm VLSI Technology The International Technology Roadmap for Semiconductors
[Summary of tips] The chip industry is enjoying a short reprieve as immersion lithography continues Moore's Law of scaling for the next few years. But for chips with a 32nm half-pitch, lithographers are counting on either extreme ultraviolet or immersion 193nm scanners enhanced with high-index fluids. Neither option may be ready in time, forcing......Please login or register with us to view this article>>
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