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Optoelectronics/Displays  

Excimer laser promises performance, long lifespan

Posted: 27 Jul 2006  Print Version  Bookmark and Share Subscribe

Keywords: Coherent  ExciStar XS  excimer laser 

[Summary of tips] The new ExciStar XS from Coherent Inc. is a compact, economical excimer laser that promises exceptional performance and lifetime characteristics. The air-cooled ExciStar XS measures 649-by-300-by-400mm and delivers up to 10mJ/pulse at 193nm with an energy stability of The ExciStar XS can operate at 157nm (F2), 193nm (ArF), 248n......
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