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System enables fully automated inspection of 300mm wafer surface

Posted: 20 Jul 2006  Print Version  Bookmark and Share Subscribe

Keywords: Vistec  LDS3300  wafer inspection system 

[Summary of tips] Vistec Semiconductor Systems (previously Leica Microsystems Semiconductor GmbH) announced that its new-generation LDS3300 enables fully automated inspection of the complete 300mm wafer surface. This breakthrough is possible through an innovative solution for wafer edge and backside inspection, the company said.The system's para......
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