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Poly silicon furnace liner reduces machine downtime

Posted: 19 Jul 2006  Print Version  Bookmark and Share Subscribe

Keywords: Integrated Materials  poly silicon furnace liner  SiFusion suite furnaceware 

[Summary of tips] Integrated Materials has announced the global introduction of its pure poly silicon SiFusion liner for semiconductor furnace processes. The new product is now available in limited quantities for "beta" phase validation at selected customers. The liner fixture completes the SiFusion suite of furnaceware, which includes furnace b......
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