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Vistec unrolls new electron beam lithography tool

Posted: 18 Jul 2006  Print Version  Bookmark and Share Subscribe

Keywords: Vistec  VB300  electron beam lithography 

[Summary of tips] Vistec Lithography Ltd (formerly Leica Microsystems Lithography) announced it has already accepted orders for the new VB300 electron beam lithography tool, the successor to its ultra-high resolution Vectorbeam series.The VB300 targets nano-lithography e-beam direct write and next-generation mask applications, Vistec said, with ......
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