Vistec unrolls new electron beam lithography tool
Keywords: Vistec VB300 electron beam lithography
[Summary of tips] Vistec Lithography Ltd (formerly Leica Microsystems Lithography) announced it has already accepted orders for the new VB300 electron beam lithography tool, the successor to its ultra-high resolution Vectorbeam series.The VB300 targets nano-lithography e-beam direct write and next-generation mask applications, Vistec said, with ......|
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