Manufacturing/Packaging 
Electrofill system supports 45-/32nm nodes
Keywords: Novellus SABRE Extreme copper electrofill system
[Summary of tips] Novellus Systems Inc. has introduced SABRE Extreme, the latest generation of the company's SABRE Electrofill system. With the flexibility to evolve for multiple-generation applications, the company said its new platform offers enhanced chemistry, process refinements and new hardware features to tackle the complex transition to ......Please login or register with us to view this article>>
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