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Crolles2 adopts KLA-Tencor DUV brightfield system

Posted: 15 Jun 2006  Print Version  Bookmark and Share Subscribe

Keywords: manufacturing  2800  broadband DUV brightfield  inspection  Crolles2 Alliance 

[Summary of tips] KLA-Tencor announced that the Crolles2 Alliance—a 300mm manufacturing and R&D collaboration between Freescale Semiconductor, STMicroelectronics and Philips Semiconductors—has adopted the 2800 broadband DUV brightfield system. KLA-Tencor said Crolles2 has been able to identify yield-impacting defects that it was unab......
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