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MEMS tester works at wafer level
Keywords: Temeon microelectromechanical system MEMS tester Tokyo Electron
[Summary of tips] Tokyo Electron Ltd (TEL) has delivered the Temeon, a new wafer-level microelectromechanical system (MEMS) tester to a MEMS device manufacturer located in Japan. The system is said to enable manufacturers to stimulate a MEMS device, and isolate and validate the electrical and mechanical functionality at the wafer level prior to ......Please login or register with us to view this article>>
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