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Easier OPC is tools' promise

Posted: 03 Apr 2006  Print Version  Bookmark and Share Subscribe

Keywords: Halo-iOPC  Tachyon OPC+  optical proximity correction  OPC  Aprio Technologies 

[Summary of tips] The semiconductor industry's battle with design-for-manufacturing (DFM) challenges is mainly focused on the resolution enhancement technology (RET) front, with EDA executives saying that as much as 80 percent of DFM revenue is lithography-related. As recent product introductions by Cadence Design Systems Inc. and startup Invari......
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