Manufacturing/Packaging 
Nikon ships 'first' production immersion system
Keywords: NSR-S609B immersion scanner production immersion lithography Nikon
[Summary of tips] Nikon Corp. has shipped what it claims to be the world's first production immersion lithography system. The NSR-S609B, an ArF immersion scanner with a hyper-NA projection lens of NA 1.07, is targeted for mass production of 55nm or better memory products and development of 45nm devices.According to Nikon, a major concern of cust......Please login or register with us to view this article>>
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