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Metrology tool handles high volume production of 300mm wafers

Posted: 12 Jan 2006  Print Version  Bookmark and Share Subscribe

Keywords: nanotechnology  metrology tool  Metryx  Mentor DF3 

[Summary of tips] A new, non-destructive, nanotechnology weight metrology tool has been introduced by Metryx to handle high volume production of 300mm semiconductor wafers. According to the press release, the Mentor DF3 has been designed to easily adapt to handling a mixed wafer fab environment where 200mm and 300mm wafers are continually interc......
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