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Applied Materials reveals latest breakthrough in nano-technology

Posted: 22 Sep 2005  Print Version  Bookmark and Share

Keywords:nano-scale interface  siconi preclean  fabricate  transistor 

[Summary of tips] BROKEN_TABLE_ HIDDEN_END -->Applied Materials Inc. revealed what it claims to be a key advancement in nano-scale interface engineering with its Applied Siconi Preclean process for fabricating transistor contacts.The Siconi Preclean replaces conventional plasma-based sputter etch technology with a dry, chemical process that gen......
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