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Metrology tool offers atomic layer measurement accuracy

Posted: 13 Sep 2005  Print Version  Bookmark and Share Subscribe

Keywords: benchtop  metrology tool  metryx  monitor tool  mems 

[Summary of tips] A manual, benchtop non-destructive R&D metrology tool that offers atomic layer measurement accuracy to 7 angstroms of oxide has been launched by Metryx. The new, simple-to-use Metryx Monitor tool is designed for both MEMS and semiconductor R&D applications where engineers want to measure material characterization properties to ......
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