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Mattson equips ProMOS' 300mm Taiwan fab

Posted: 26 May 2005  Print Version  Bookmark and Share Subscribe

Keywords: Mattson Technology  wafer 

[Summary of tips] BROKEN_TABLE_ HIDDEN_END -->Mattson Technology Inc. will be used to support the production ramp at Promos Technologies' newest 300mm wafer fab in the Central Taiwan Science Park (CTSP), Taiwan. The systems, which include the Aspen III ICPHT and the Helios, will be used in ProMOS' Fab III for the volume production of advanced m......
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