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UMC adopts Synopsys i-Virtual stepper system for photomask
Keywords: i-virtual stepper system photomask inspection dfm
[Summary of tips] BROKEN_TABLE_ HIDDEN_END -->United Microelectronics Corp. (UMC) has adopted Synopsys Inc.'s i-Virtual Stepper system (i-VSS) for photomask inspection qualification. The i-VSS enhances mask inspection turnaround time and yield and is part of Synopsys' design for manufacturing (DFM) tool suite."The i-Virtual Stepper system is a ......Please login or register with us to view this article>>
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